LHR3400C Series(AC servo motor)
3-Axis Cylindrical Coordinate Clean Robot
Environment
Clean room atmosphere
Single arm
Arm length
400 mm
Vertical Stroke
400/500/600/760/900/1500 mm
＊The design can be changed according to the equipment specification requirements.
Payload Capacity
15kg(calculated for the arm 3rd joint)
Characteristics
Clean Robot LHR3000 Series
Designed for handling FPD substrate in a PFD production line or inspection line.
Telescope type is available for Z-axis of 760mm or longer, which allows the low-passline.
Execution of origin search is not required by using the servo motors with absolute encoders.
● Sensors (for alignment, substrate existence detection, mapping) can be installed in the end-effector.
● Payload capacity: 3 kg or less (calculated on the arm 3rd joint).
● AC servo motors with absolute encoders installed in all axes.
● RS232C and parallel photo I/O are standard for control.
● Base or flange mounting type is selectable.
● Wafer holding: end-effector with vacuum suction, passive edge, edge grip, or Bernoulli type End-effector
Standard Specifications
Robot Model
LHR3400C-600-AM
Carrying Object
730mm×920mm×1.1mm FPD glass substrate(representative example)
Robot Model Type
3-Axis Cylindrical coordinate type
Motor Type
AC servo motor
Operating Range
From the robot center to the wafer center：1550mm
Rotation Angle (Theta-axis)：330deg
Z-axis: 600mm
Carrying Speed
Arm (R-axis)：1375mm/1.8sec
Rotation Angle (Theta-axis) : 180 deg/1.5sec
Z-axis：600mm / 1.7sec
Repeatability
Within ±0.2mm
Cleanliness
0.3µm/cf Class 10 (at transfer level when exhausting driving)
Utility
Power：AC200V single phase ±10% 3 kVA
Vacuum：-73 kPa or more 5
Interface
RS232C and parallel photo I/O
傑億爾股份有限公司
統一編號: 89133741
新竹縣竹北市嘉政九街29號1樓
JEL Automation Co.,Ltd
1F., No. 29, Jiazheng 9th St., Zhubei City, Hsinchu County 302053 , Taiwan (R.O.C.)
TEL: 03-6583741