Characteristics

Aligner for Multiple Types of Wafers
A prealigner for aligning multiple types of wafers̶regardless of wafer materials such as mirror surface,

transparent or translucent wafer; warped wafer; or non-standard notch or orientation flat.

● Available for silicon wafers with BG tape as well as silicon, transparent,or translucent wafers.

● Available for non-SEMI standard notch or flat.
● Z-axis capable of redo operations is optional.

● Size, shape, material of spindle can be changed according to the wafer type.

● Bernoulli type is also available.

● Full auto-adjustment software JEL ALIGN TOOL comes with the aligner.
● Motor drivers and a controller are built in the aligner.
● Control: RS232C and parallel photo I/O

Standard Specifications