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System
Stable, Precise, and Highly Integrable Systems
SORTER SYSTEM 300 wafers/h
4-port inline type with 300 wafers/h throughput
- Product Profile
- Product Model : SORTER SYSTEM
- Environment : Clean room atmosphere
- Wafer Size : 300mm
- Carrying Object : Silicon wafer
- Throughput : 300 wafers/h
＊Product specifications are for reference only, various types of automation equipment and specifications can be designed according to customer needs.
Characteristics
- Compliance : SEMI Standard (E15.1-0600, E57-0600, E62-0999, E63-0600, E64-0600)
- High-throughput（300 wafers/h）
- Smooth and high-speed wafer transfer through the planning of the arm's range of motion.
- Wafer ID reader is available. (Reading both sides of wafer is an option)
Standard Specifications
| Product Model | SORTER SYSTEM 300 wafers/h | ||
|---|---|---|---|
| Carrier | 300mm FOUP (for 25 wafers) Compliance: SEMI E47.1, E62 | ||
| Carrying Object | 300mm Silicon wafer (Thickness: 775µm) | ||
| Throughput | 300 wafers/h | ||
| Cleanliness | ISO Class 2 (when equipped with FFU) | ||
| Dimension | W 1250mm x D 2500mm x H 1900mm | ||
| Mass | Approx. 800kg | ||
| Utility | Power: AC200V Single phase ±10% 2kVA Dry air: 0.5MPa±10% Vacuum: -53kPa or more |
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※ The above specifications are the basic specifications.