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System
Stable, Precise, and Highly Integrable Systems
SSY-11010
Automatic wafer transfer system for wafer container
- Product Profile
- Product Model : SSY-11010
- Environment : Clean room atmosphere
- Wafer Size : 200mm
- Carrying Object : Silicon wafer, spacer (interlayer paper)
- Applicable Cassette Type : 200 mm container, 200 mm wafer cassette
＊Contact us for other wafer sizes, the number of wafer containers and cassettes, or aligner installation.
Also contact us for wafer containers from any manufacturer.
Characteristics
High accuracy handling of thin wafer inside the wafer container and cassette.
Equipped with mechanism of automatic lid opening/closing of the wafer container (Patent pending).
- Automatic recognition of wafer and the spacer (interlayer paper) in the wafer container.
- Automatic wafer transfer between the wafer container and the wafer cassette (package/unpackage).
- Available for thin wafer as equipped with Bernoulli end-effector.
- Automatic recognition of the height of wafer.
- The number of cassettes and the wafer sizes can be customized.
- Corresponding to the wafer container made by Achilles Corporation.
- Two fan filter units (HEPA) are installed to ensure the cleanliness.
- Color sensor allows spacers (interlayer papers) with different colors to be detected easily.
Standard Specifications
| Product Model | SSY-11010 | ||
|---|---|---|---|
| Applicable Cassette Type | 200 mm wafer container, 200 mm cassette | ||
| Carrying Object | 200 mm silicon wafer, 200 mm spacer (interlayer paper) | ||
| Cleanliness | ISO Class 2 | ||
| External Dimensions | W 1600mm x D 1305mm x H 1800mm | ||
| Mass | Approx. 700kg | ||
| Utility | Power: AC200V ±10% Clean air: 0.5 MPa 150 NL/min or more |
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※ Contact us for other wafer sizes, the number of wafer containers and cassettes, or aligner installation etc.