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System
Stable, Precise, and Highly Integrable Systems
SORTER SYSTEM 150mm
- Product Profile
- Product Model : SORTER SYSTEM
- Environment : Clean room atmosphere
- Wafer Size : 150mm
- Carrying Object : 150mm wafer (Glass, Sapphire, GaAs)
- Throughput : 140片/h
＊Product specifications are for reference only, various types of automation equipment and specifications can be designed according to customer needs.
Characteristics
- Access to 4 cassettes is available without a track by the horizontal and multi-joint type robot (GCR4210-500-AM).
- 500mm Z-stroke can access the vertically-setting cassettes.
- Flip unit of robot can handle wafers without contacting process side.
- Mapping sensor is installed to the wrist-block unit.
- Open/Close detection sensor is installed to the door and locked during operation.
- Aligner (SAL3361GR) for glass wafer is installed.
- Communication with users' system can be changed.
- Customization is available according to user's needs.
Standard Specifications
| Product Model | SORTER SYSTEM | ||
|---|---|---|---|
| Carrying Object | 150mm wafer (Glass, Sapphire, GaAs) | ||
| Throughput | 140 wafer/h (Process time in the system is not included) | ||
| 【GCR4210-500-AM】 | |||
| Operating range | From the robot center to the wafer center: 672mm Rotation Angle(Theta-axis): 335deg Z-axis: 500mm Flip axis: 180deg |
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| Carrying Speed (Ave.) | Arm: 550mm/sec Rotation Angle (Theta-axis): 300度/sec Z-axis: 300mm/sec |
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| Carrying Speed(Max.) | Arm: 900mm/sec Rotation Angle (Theta-axis): 400度/sec Z-axis: 450mm/sec |
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| Carrying Speed(w/o flip unit) | Arm: 1800mm/sec Rotation Angle (Theta-axis): 540度/sec Z-axis: 500mm/sec |
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| Repeatability | Within ±0.1mm | ||
| 【SAL3361GR】 | |||
| Positioning accuracy | Centering: Within ±0.2mm Flat locating: Within±0.2deg |
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| Positioning time | Notch search: Within 3 sec (Pick-up/placing time is not included.) |
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| Positioning correction range | Within 4mm radius | ||
| 【System】 | |||
| Wafer holding method | By vacuum suction with end-effector | ||
| Cleanliness | ISO Class2（ISO14644） | ||
| Footprint | 640mm×835mm（Excluding touch panel） | ||
| Mass | Approx.350kg | ||
| Utility | Power：AC200V Single phase 15A Vacuum: -53kPa or more (w/vacuum type end effector) |
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＊The above specifications are the basic specifications.