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System
Stable, Precise, and Highly Integrable Systems
SSY-20010
Automatic wafer transfer system for wafer container
- Product Profile
- Product Model : SSY-20010
- Environment : Clean room atmosphere
- Wafer Size : 300mm
- Carrying Object : Silicon wafer, spacer (interlayer paper)
- Applicable Cassette Type : 300 mm container, 300 mm wafer cassette
＊Various wafer sizes are available. Contact us for the number of wafer containers and cassettes, or aligner installation.
Characteristics
High accuracy transport of thin wafer in the wafer container.
- Automatic wafer transfer between the wafer container and the wafer cassette.
- Available for thin wafer as equipped with Bernoulli end-effector.
- Automatic identification of wafer and the spacer (interlayer paper).
- Automatic identification of the height of wafer.
- The number of cassettes and the wafer sizes can be customized.
- Automatic lid opening/closing of the wafer container.
- Wafer container : made by Achilles Corporation.
- Fan filter unit (HEPA) is installed for the cleanliness.
- Color sensor allows spacers (interlayer papers) with different colors to be detected easily.
(Please contact JEL for details.)
Standard Specifications
| Product Model | SSY-20010 | ||
|---|---|---|---|
| Applicable Cassette Type | 300 mm wafer container, 300 mm cassette (FOUP) | ||
| Carrying Object | 300 mm silicon wafer, 300 mm spacer (interlayer paper) | ||
| Cleanliness | Fan filter units is installed. | ||
| External Dimensions | W 1350mm x D 1434mm x H 1900mm | ||
| Mass | Approx. 450kg | ||
| Utility | Power: AC200V±10% Clean air: 0.5 MPa 250 NL/min or more Vacuum: -70kPa or more |
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＊Various wafer sizes are available. Contact us for the number of wafer containers and cassettes, or aligner installation.