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- SAL2061
JEL Aligner
SAL2061
Edge-grip typeWafer Aligner
- Features
- Designed for aligning wafers in a production line or inspection line of semiconductor.
Description
Product Model
SAL2061
Environment
Clean room atmosphere
Wafer Size
6 inches
Characteristics
Designed for aligning wafers in a production line or inspection line of semiconductor.
- Minimized footprint and designed for aligning small wafer.
- High-speed, high-accuracy centering and flat/notch locating of small wafer.
Standard Specifications
| Product Model | SAL2061 | |||
|---|---|---|---|---|
| Carrying Object | JEIDA standard 6 inches silicon wafer | |||
| Positioning Time | Orientation flat search: Within 4 sec (Wafer pick-up/placing time excluded) |
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| Positioning Accuracy | Centering: Within ±0.3 mm Orientation flat locating: Within ±0.2 deg |
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| Sensor | Red LED transmissive sensor | |||
| Wafer Holding Method | By edge grip | |||
| Cleanliness | 0.1 µm/cf Class 1 (at wafer transfer level when exhausting driving part) | |||
| Driving method | Small size stepping motors at each axis (internal motor driver) | |||
| Utility | Power: DC24V±10% 2A | |||
