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Products
High-Tech Manufacturing
AC servo motor
MTCR4160
4-Axis Cylindrical Coordinate Clean Robot
- Features
- Designed for handling 300mm wafers in a production line or inspection line of semiconductor.
- High-speed handling by AC servo motor and superior cost performance compared to MTHR type.
- Certified CE marking.
- Execution of origin search is not required by using the servo motors with absolute encoders.
Description
Model Name
MTCR4160
Environment
ISO Class 2 Clean room atmosphere
Vertical Stroke (Z-axis)
300 mm / 400 mm / 500 mm
*Design can be modified according to equipment specifications and requirements.
Payload Capacity
Below 4 kg (Caculated for the 3rd joint)
Characteristics
Designed for handling 12 inches wafers in a production line or inspection line of semiconductor.
High-speed handling by AC servo motor and superior cost performance compared to MTHR type.
Certified CE marking.
Execution of origin search is not required by using the servo motors with absolute encoders.
- Arm lineup: 160mm, 200mm
- Twin-arm reduces the wafer swap time.
- Base or flange mounting type is selectable.
- Motion monitoring is available.
- RS232C and parallel photo I/O are standard for control.
- AC servo motor installed in all axes.
- High-speed, high-accuracy wafer handlingby S-curved speed control.
- Wafer holding: end-effector with vacuum suction, passive edge, edge grip, or Bernoulli type End-effector.
- End-effector material: CFRP, Al, ceramic, or others.
- Optimal end-effector is selectable according to the carrying object and line layout.
Standard Specifications
| Robot Arm Model | MTCR4160-300-AM | ||
|---|---|---|---|
| Handled Object | Wafer up to 12 inches | ||
| Wafer Holding Method | By vacuum suction | ||
| Mechanical Structure | 4-axis Cylindrical coordinate type | ||
| Motor | AC servo motor | ||
| Operating Range | From the robot center to the wafer center: 575mm Rotation angle (θ axis): 340 deg Vertical Stroke (Z-axis): 300mm |
||
| Carrying Speed(Ave.) | Arm (R-axis): 850mm/sec Rotation (θ axis): 340deg/sec Z-axis: 330mm/sec |
||
| Carrying Speed(Max.) | Arm (R-axis): 1800mm/sec Rotation (θ axis): 550deg/sec Z-axis: 500mm/sec |
||
| Resolution | Arm (R-axis): Below 9.82µm Rotation (θ axis): 0.0015deg Z-axis: 1.96µm |
||
| Handling level | 674.5mm (Base mounting level to end-effector level) | ||
| Repeatability | Within ±0.1mm | ||
| Cleanliness | ISO Class 2 (at wafer transfer level when exhausting driving part) | ||
| Utility | Power: AC200V single phase ±10% 3kVA Vacuum: -53kPa or more |
||
| Controller Model | C5000S Series | ||
| Interface | RS232C and parallel photo I/O | ||
＊Example of standard specifications with JEL standard end-effector (vacuum type)
