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Products
High-Tech Manufacturing
AC servo motor
MTCR4200
4-Axis Cylindrical Coordinate Clean Robot
- Features
- Designed for handling wafers in a production line or inspection line of semiconductor.
- High-speed handling by AC servo motor and superior cost performance compared to MTHR type.
- Execution of origin search is not required by using the servo motors with absolute encoders.
Description
Model Name
MTCR4200
Environment
Clean room atmosphere
Vertical Stroke (Z-axis)
300 mm / 400 mm / 500 mm
*Design can be modified according to equipment specifications and requirements.
Characteristics
Designed for handling wafers in a production line or inspection line of semiconductor.
High-speed handling by AC servo motor and superior cost performance compared to MTHR type.
Execution of origin search is not required by using the servo motors with absolute encoders.
- Twin-arm reduces the wafer swap time.
- Base or flange mounting type is selectable.
- Motion monitoring is available.
- RS232C and parallel photo I/O are standard for control.
- AC servo motor installed in all axes.
- High-speed, high-accuracy wafer handlingby S-curved speed control.
- Wafer holding: end-effector with vacuum suction, passive edge, edge grip, or Bernoulli type End-effector.
- End-effector material: CFRP, Al, ceramic, or others.
- Optimal end-effector is selectable according to the carrying object and line layout.
Standard Specifications
＊Please contact us for the detailed specifications.
