SCR3160CS Series(stepping motors)
3-Axis Cylindrical Coordinate Type Single-Arm Clean Robot
Environment
Clean room atmosphere
Single-Arm
Arm length
100mm,130mm,160mm,200mm
Vertical Stroke
200mm / 300mm / 400mm / 450mm / 500mm / 550mm / 600mm
＊The design can be changed according to the equipment specification requirements.
Payload Capacity
3kg(calculated for the arm 3rd joint)
Characteristics
Clean Robot SCR3000CS Series
Featuring an open-loop control system and stepping motors, this series ensures high safetyand stability.
This JEL's long-term standard robot allows users to customize easily.
Suitable for various types of wafers up to 300 mm.
● Optimal end-effector is selectable according to the carrying object and line layout.
● Compatible with the former SHR model and current SCR3000CSN series,this SCR3000CS series ensures easier replacement.
● Payload capacity: 3 kg or less (calculated on the arm 3rd joint)
● 2-phase stepping motor installed in all axes.
● Control method: RS232C and parallel photo I/O
● Base or flange mounting type is selectable according to system layouts.
● Wafer holding: end-effector with vacuum suction, passive edge, edge grip, or Bernoulli type End-effector.
Standard Specifications
Robot Model
SCR3160CS-300-PM
Carrying Object
Up to 300mm silicon wafer
Wafer Holding Method
By vacuum suction
Robot Model Type
3-axis Cylindrical coordinate type
Motor Type
Stepping motor
Operating Range
From the robot center to the wafer center：502.7mm
Rotation Angle (Theta-axis)：340deg
Z-axis: 300mm
Carrying Speed
Arm (R-axis)：610mm/sec
Rotation Angle (Theta-axis) : 340 deg/sec
Z-axis：250mm / sec
Repeatability
Within ±0.1mm
Cleanliness
ISO Class 2 (at wafer transfer level when exhausting driving part)
Utility
Power: DC24V±10% 15A
Vacuum: -53kPa or more
Mass
Approx. 25kg
Controller Model
C4000 series
Interface
RS232C and parallel photo I/O
傑億爾股份有限公司
統一編號: 89133741
新竹縣竹北市嘉政九街29號1樓
JEL Automation Co.,Ltd
1F., No. 29, Jiazheng 9th St., Zhubei City, Hsinchu County 302053 , Taiwan (R.O.C.)
TEL: 03-6583741