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Products
High-Tech Manufacturing
Stepping motor
SCR3160CSN
3-Axis Cylindrical Coordinate Closed-loop control Clean Robot
- Features
- New type of 3-axis cylindrical coordinate type single-arm clean robot
- For handling wafers from 2 inch to 300mm with low-cost, high-speed handling, and no step-out error
- Use a closed-loop stepper motor
Description
Model Name
SCR3160CSN
Environment
ISO Class 2 Clean room atmosphere
Operating Range
340 mm (3rd joint center)Vertical Stroke (Z-Axis)
200mm / 300mm / 400mm / 450mm / 500mm
*Design can be modified according to equipment specifications and requirements.
Payload Capacity
Below 3 kg (Caculated for the 3rd joint)
Characteristics
New type of 3-axis cylindrical coordinate type single-arm clean robot.
For handling wafers from 2 inches to 12 inches with low-cost, high-speed handling, and no step-out error.
Path planning handling has joined the lineup of clean robot with the closed-loop control.
Access to the chamber stage arranged in parallel without a track improves the flexibility in the layout design and the cost-performance.
- High reliability: Closed-loop control achieves no step-out error under rapid load change or acceleration.
- Reduced origin search time: By absolute encoder
- Equipped with the batteryless multi-rotation absolute sensor
- Robot replacement is available: Compatible with conventional model (installation/performance)
- High rigidity: Payload capacity of 3kg (calculated for the arm 3rd joint/including wrist-block, end-effector, and wafer)
- Arm lineup: 100mm, 130mm, 160mm, 200mm
- Base or flange mounting type is selectable according to the customer’s system layout.
- Bernoulli end-effector is available (option)
Standard Specifications
| Robot Arm Model | SCR3160CSN-300-CM | |||
|---|---|---|---|---|
| Handled Object | Wafer up to 12 inches (Available for various types of wafers) | |||
| Wafer Holding Method | By vacuum suction | |||
| Mechanical Structure | 3-axis Cylindrical coordinate type | |||
| Motor | Stepping motor (Closed-loop) | |||
| Operating Range | From the robot center to the wafer center: 552.7mm Rotation angle (θ axis): 340deg Vertical Stroke (Z-axis): 300mm |
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| Carrying Speed (Ave.) | Arm (R-axis): 610mm/sec Rotation (θ axis): 340deg/sec Vertical Stroke (Z-axis): 250mm/sec |
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| Carrying Speed(Max.) | Arm (R-axis): 1220mm/sec Rotation (θ axis): 500deg/sec Vertical Stroke (Z-axis): 320mm/sec |
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| Resolution | Arm (R-axis): Below 10.0µm Rotation (θ axis): 0.0015deg Vertical Stroke (Z-axis): 2.0µm |
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| Repeatability | Within ±0.1mm | |||
| Cleanliness | ISO Class 2 (at wafer transfer level when exhausting driving part) | |||
| Utility | Power: DC24V±10% 10A Vacuum: -53kPa or more |
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| Controller Model | C4000B Series | |||
| Interface | RS232C and parallel photo I/O | |||
＊Example of standard specifications with JEL standard end-effector (vacuum type)
