Introduction to Edge-grip End Effectors

Usage

Edge-grip end effectors are used to secure the outer edge of the wafer with multiple clamps.
The wafer can be fixed in place using methods, such as cylinders or springs.

The Applicable Timing

This technique is suitable for transporting wafers where contact with the processed surface is not allowed, as well as for transporting thin wafers such as MEMS wafers.
When vacuum adsorption could cause stress on the adsorption surface and potentially damage the wafer, edge gripping is preferred.