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Products
High-Tech Manufacturing
Stepping motor
STVCR4190
4-Axis Cylindrical Coordinate Clean Robot
- Features
- Designed for handling wafers in the vacuum chamber of production line and inspection line.
- Double payload and superior cost performance compared to STVHR series.
- Compatible with STVHR series and it is possible to replace or upgrade into STVCR series.
- Execution of origin search is not required by using the servo motors with absolute encoders.
Description
Model Name
STVCR4190
Environment
Magnetic fluid sealing and filter
Vacuum (Temp. 15°C to 50°C)
Driving unit：Clean room atmosphere (Temp. 15°C to 40°C)
Vertical Stroke (Z-axis)
50 mm
Payload Capacity
Below 3 kg (Caculated for the 3rd joint)
Characteristics
Designed for handling wafers in the vacuum chamber of production line and inspection line.
Double payload and superior cost performance compared to STVHR series.
Compatible with STVHR series and it is possible to replace or upgrade into STVCR series.
Execution of origin search is not required by using the servo motors with absolute encoders.
- Magnetic fluid sealing is used for arm joint.
- Vacuum sealing: Magnetic fluid sealing and bellows are used.
- For cleanliness: 5µm mesh filter installed for exhaust ventilation in the arm.
- Twin-arm reduces the wafer swap time.
- Motion monitoring is available.
- RS232C and parallel photo I/O are standard for control.
- AC servo motors with absolute encoders installed in all axes.
- High-speed, high-accuracy wafer handlingby S-curved speed control.
- AC servo motor or 2-phase pulse motor type is selectable.
- Wafer holding: end-effector with passive edge or edge grip type End-effector.
- End-effector material: CFRP, Al, ceramic, or others.
- Optimal end-effector is selectable according to the carrying object and line layout.
Standard Specifications
| Robot Arm Model | STVCR4190-050-AM | |||
|---|---|---|---|---|
| Handled Object | Wafer up to 12 inches | |||
| Wafer Holding Method | By end-effector with passive edge or edge grip type end-effector | |||
| Mechanical Structure | 4-axis Cylindrical coordinate type | |||
| Motor | AC servo motor | |||
| Operating Range | 3rd joint center: 380mm Rotation angle (θ axis): 330deg Vertical Stroke (Z-axis): 50mm |
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| Carrying Speed | Arm (R-axis): 340mm/sec Rotation (θ axis): 120deg/sec Vertical Stroke (Z-axis): 50mm/sec |
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| Repeatability | Within ±0.1mm | |||
| Cleanliness | Magnetic fluid sealing and filter | |||
| Vacuum resistance | 1.33×10-6Pa | |||
| Utility | Power: AC200V Single phase ±10% 1kVA | |||
| Mass | Approx. 80kg | |||
＊Representative specifications of STVCR4190-050-AM.
It can be changed depending on the carrying object and end-effector type.
