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Products
High-Tech Manufacturing
Stepping motor
SWCR3160CS
3-Axis Cylindrical Coordinate Waterproof Clean Robot
- Features
- Designed for handling 12 inches wafers in a LSI production line under the condition of acid or alkaline mist (IP64).
- Flip and edge grip functions are available.
Description
Model Name
SWCR3160CS
Environment
Clean room atmosphere
Vertical Stroke (Z-axis)
200mm / 300mm
*Design can be modified according to equipment specifications and requirements.
Payload Capacity
Below 3 kg (Caculated for the 3rd joint)
Characteristics
Designed for handling 12 inches wafers in a LSI production line under the condition of acid or alkaline mist (IP64).
Flip and edge grip functions are available.
- Corrosion protection for arm by Teflon coating.
- V-type seals are used for waterproof of arm joint.
- Viton seals are used for parts joint.
- Bellows are used for waterproof of vertical axis.
- Motion monitoring is available.
- RS232C and parallel photo I/O are standard for control.
- 2-phase stepping motor installed in all axes.
- High-speed, high-accuracy wafer handlingby S-curved speed control.
- Wafer holding: end-effector with vacuum suction, passive edge, or edge grip type End-effector.
- Optimal end-effector is selectable according to the carrying object and line layout.
Standard Specifications
| Robot Arm Model | SWCR3160CS | |||
|---|---|---|---|---|
| Handled Object | Wafer up to 12 inches | |||
| Wafer Holding Method | By edge grip | |||
| Mechanical Structure | 3-axis Cylindrical coordinate type | |||
| Motor | Stepping motor | |||
| Operating Range | From the robot center to the wafer center: 312mm Rotation angle (θ axis): 340deg Vertical Stroke (Z-axis): 300mm |
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| Carrying Speed(Ave.) | Arm (R-axis): 250mm/sec Rotation (θ axis): 120deg/sec Vertical Stroke (Z-axis): 70mm/sec |
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| Carrying Speed(Max.) | Arm (R-axis): 500mm/sec Rotation (θ axis): 160deg/sec Vertical Stroke (Z-axis): 85mm/sec |
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| Resolution | Arm (R-axis): Below 49µm Rotation (θ axis): 0.0214deg Vertical Stroke (Z-axis): Below 12.5µm |
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| Handling level | 255mm (Mounting level to end-effector level) | |||
| Repeatability | Within ±0.2mm | |||
| Utility | Power: DC24V±10% 15A Positive pressure: 0.15MP |
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| Mass | Approx. 37kg (robot arm unit) | |||
| Controller Model | C4000 Series | |||
| Interface | RS232C and parallel photo I/O | |||
＊Example of standard specifications with edge grip type end-effector.