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- SVAL3001
JEL Aligner
SVAL3001
Wafer Vacuum Aligner
- Features
- Edge-grip vacuum aligner for susceptor tray (compound semiconductors and Si wafers).
- High-speed and high-accuracy alignment is available.
Description
Product Model
SVAL3001
Environment
Clean room atmosphere
Wafer Size
4 to 12 inches, others
Characteristics
Edge-grip vacuum aligner for susceptor tray (compound semiconductors and Si wafers).
High-speed and high-accuracy alignment is available.
- Payload capacity: Below 4kg
- Stand-alone aligner using vacuum resistance sensor (Set the controller in the atmospheric environment.)
- Vacuum sealing: Magnetic fluid sealing and bellows are used.
- Motion monitoring is available.
- RS232C and parallel photo I/O are standard for control.
- Index function: Rotate according to the wafer position in the tray.
Standard Specifications
| Product Model | SVAL3001 | |||
|---|---|---|---|---|
| Carrying Object | SEMI standard 4 to 12 inches silicon wafer, various types of susceptors | |||
| Positioning Time | Notch search : Within 4 sec | |||
| Positioning Accuracy | PositioningCentering: Within ±0.3 mm Notch locating: Within ±0.3 deg |
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| Sensor | Vacuum resistance definite-reflective sensor | |||
| Vacuum sealing | Magnetic fluid sealing Welded metal bellows (stroke: 40 mm) |
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| Vacuum resistance | 1.33×10-6Pa | |||
| Driving method | 2-phase stepping motor (for 3 axes) Separate controller |
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| Utility | Power: DC24V±10% 8A | |||