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Products
High-Tech Manufacturing
Stepping motor
STCR4160S
4-Axis Cylindrical Coordinate Clean Robot
- Features
- Designed for handling small wafers in a production line or inspection line of semiconductor.
- Certified CE marking.
Description
Model Name
STCR4160S
Environment
ISO Class 2 Clean room atmosphere
Vertical Stroke (Z-axis)
200mm / 300mm / 400mm / 450mm / 500mm / 550mm / 600mm
*Design can be modified according to equipment specifications and requirements.
Payload Capacity
Below 3 kg (Caculated for the 3rd joint)
Characteristics
Designed for handling small wafers in a production line or inspection line of semiconductor.
Certified CE marking.
- Arm lineup: 100mm, 130mm, 160mm, 200mm
- Twin-arm reduces the wafer swap time.
- Base or flange mounting type is selectable.
- Motion monitoring is available.
- RS232C and parallel photo I/O are standard for control.
- 2-phase stepping motor installed in all axes.
- High-speed, high-accuracy wafer handlingby S-curved speed control.
- Wafer holding: end-effector with vacuum suction, passive edge, edge grip type End-effector.
- End-effector material: CFRP, Al, ceramic, or others.
- Optimal end-effector is selectable according to the carrying object and line layout.
Standard Specifications
| Robot Arm Model | STCR4160S-300-PM | |||
|---|---|---|---|---|
| Wrist Block | SART08674 | |||
| Blade | SC-YW-240 | |||
| Handled Object | Wafer up to 12 inches | |||
| Wafer Holding Method | By vacuum suction | |||
| Mechanical Structure | 4-axis Cylindrical coordinate type | |||
| Motor | Stepping motor | |||
| Operating Range | From the robot center to the wafer center: 575mm Rotation angle (θ axis): 340deg Vertical Stroke (Z-axis): 300mm |
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| Carrying Speed(Ave.) | Arm (R-axis): 570mm/sec Rotation (θ axis): 220deg/sec Vertical Stroke (Z-axis): 200mm/sec |
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| Carrying Speed(Max.) | Arm (R-axis): 1140mm/sec Rotation (θ axis): 270deg/sec Vertical Stroke (Z-axis): 250mm/sec |
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| Resolution | Arm (R-axis): Below 12.6µm Rotation (θ axis): 0.0045deg Vertical Stroke (Z-axis): 6.25µm |
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| Handling level | 620mm (Base mounting level to upper end-effector level) | |||
| Repeatability | Within ±0.1mm | |||
| Cleanliness | ISO Class 2 (at wafer transfer level when exhausting driving part) | |||
| Utility | Power: DC24V±10% 16A Vacuum: -53kPa or more |
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| Mass | Approx. 30kg (robot arm unit) | |||
| Controller Model | C4000 Series | |||
| Interface | RS232C and parallel photo I/O | |||
＊Example of standard specifications with JEL standard end-effector (vacuum type)
