Characteristics

Clean Robot STCR4000SN Series

Featuring a step-out-less closed-loop control system, built-in batteryless absolute encoders

and stepping motors, this series ensures high convenience, safety and stability as well as

various ways of transferring. Suitable for various types of wafers up to 300 mm.

● Twin-arm reduces tact time to replace wafers.
● Step-out-less closed-loop control system under rapid load change or acceleration

● Equipped with batteryless multi-rotation absolute sensors.

● Robot replacement is available: Compatible with conventional model (installation/performance).

● Compatible with the former SHR model and current SCR3000CS series,this SCR3000CSN series ensures easier replacement.

● Payload capacity: 3 kg or less (calculated on the arm 3rd joint).
● Control method: RS232C and parallel photo I/O.

● Base or flange mounting type is selectable according to system layouts.

● Wafer holding: end-effector with vacuum suction, passive edge, edge grip, or Bernoulli type End-effector.

Standard Specifications