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Cleanroom Classification Table (ISO / FED STD / GMP)
September 29,2025
| Cleanroom Level | ISO 14644-1 | FED STD 209E | EU GMP Grade (In Operation) |
Particle Count Standard (≧0.5µm) |
||
|---|---|---|---|---|---|---|
| Ultra Clean | ISO Class 1 | - | - | ≦10 particles/m3 | ||
| Very Clean | ISO Class 2 | - | - | ≦100 particles/m3 | ||
| Superior Grade | ISO Class 3 | Class 1 | - | ≦1,000 particles/m3 | ||
| High Grade | ISO Class 4 | Class 10 | Grade A | ≦10,000 particles/m3 | ||
| Medium Grade | ISO Class 5 | Class 100 | Grade B | ≦100,000 particles/m3 | ||
| Common Grade | ISO Class 6 | Class 1,000 | Grade C | ≦1,000,000 particles/m3 | ||
| Basic Grade | ISO Class 7 | Class 10,000 | Grade D | - | ||
| Minimum Grade | ISO Class 8 | Class 100,000 | - | - | ||
Particle Size Description / Application Example
≥0.5μm Standard for semiconductor and optical assembly
≥0.3μm Higher-grade control for medical and pharmaceutical
≥5μm Common threshold for GMP pharmaceutical regulations
※Notes
ISO 14644-1: The current international standard used widely across industries such as semiconductor, optics, pharmaceuticals, and medical devices.
FED STD 209E: An outdated U.S. federal standard that has been replaced by ISO but is still referenced in some legacy systems or documents.
EU GMP Grades: Used in pharmaceutical cleanrooms, with grades A to D defined by operational state (in operation or at rest). The table shows "in operation" levels.