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Products
High-Tech Manufacturing
Stepping motor
STWCR4160
4-Axis Cylindrical Coordinate Waterproof Clean Robot
- Features
- STWCR4000 series, 4-axis cylindrical coordinate clean robot (waterproof), is designed for handling wafers under the condition of acid or alkaline mist (IP64). Flip operation for 300 mm wafers with edge grip functions.
Description
Model Name
STWCR4160
Environment
Clean room atmosphere
Vertical Stroke (Z-axis)
300 mm
Payload Capacity
Below 3 kg (Caculated for the 3rd joint)
Characteristics
STWCR4000 series, 4-axis cylindrical coordinate clean robot (waterproof), is designed for handling wafers under the condition of acid or alkaline mist (IP64). Flip operation for 12 inches wafers with edge grip functions.
- Arm lineup: 160 mm, 200 mm
- Corrosion protection for arm by Teflon coating.
- V-type seals are used for waterproof of arm joint.
- Viton seals are used for parts joint.
- Bellows are used for waterproof of vertical axis.
- Twin-arm reduces the wafer swap time.
- Motion monitoring is available.
- RS232C and parallel photo I/O are standard for control.
- 2-phase stepping motor installed in all axes.
- High-speed, high-accuracy wafer handling by S-curved speed control.
- Wafer holding: end-effector with vacuum suction, passive edge, or edge grip type End-effector.
- End-effector is selectable according to the carrying object and line layout.
Standard Specifications
| Robot Arm Model | STWCR4160-300-PM | |||
|---|---|---|---|---|
| Handled Object | Wafer up to 12 inches | |||
| Wafer Holding Method | By vacuum suction | |||
| Mechanical Structure | 4-axis Cylindrical coordinate type | |||
| Motor | Stepping motor | |||
| Operating Range | From the robot center to the wafer center: 315mm Rotation angle (θ axis): 340deg Vertical Stroke (Z-axis): 300mm |
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| Carrying Speed(Ave.) | Arm (R-axis): 280mm/sec Rotation (θ axis): 90deg/sec Vertical Stroke (Z-axis): 90mm/sec |
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| Carrying Speed(Max.) | Arm (R-axis): 550mm/sec Rotation (θ axis): 120deg/sec Vertical Stroke (Z-axis): 120mm/sec |
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| Resolution | Arm (R-axis): Below 126 µm Rotation (θ axis): 0.0045 deg Vertical Stroke (Z-axis): Below 6.25 µm |
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| Repeatability | Within ±0.2mm | |||
| Utility | Power: DC24V±10% 11A Positive Pressure: 0.15 MPa |
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| Controller Model | C4000 Series | |||
| Interface | RS232C and parallel photo I/O | |||
＊Example of standard specifications with JEL standard end-effector (vacuum type)
