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Products
High-Tech Manufacturing
Stepping motor
SVCR3160
3-Axis Cylindrical Coordinate Clean Robot
- Features
- Designed for handling wafers in the vacuum chamber of production line and inspection line.
- Double payload and superior cost performance compared to SVHR series.
- Compatible with SVHR series and it is possible to replace or upgrade into SVCR series.
Description
Model Name
SVCR3160
Environment
Magnetic fluid sealing and filter
Vacuum (Temp. 15°C to 50°C)
Driving unit：Clean room atmosphere (Temp. 15°C to 40°C)
Vertical Stroke (Z-axis)
20mm / 40mm
*Design can be modified according to equipment specifications and requirements.
Payload Capacity
Below 2 kg (Caculated for the 3rd joint)
Characteristics
Designed for handling wafers in the vacuum chamber of production line and inspection line.
Double payload and superior cost performance compared to SVHR series.
Compatible with SVHR series and it is possible to replace or upgrade into SVCR series.
- Magnetic fluid sealing is used for arm joint.
- Vacuum sealing: Magnetic fluid sealing and bellows are used.
- For cleanliness: 5µm mesh filter installed for exhaust ventilation in the arm.
- Motion monitoring is available.
- RS232C and parallel photo I/O are standard for control.
- 2-phase stepping motor installed in all axes.
- Servo motor type is available.
- High-speed, high-accuracy wafer handlingby S-curved speed control.
- Wafer holding: end-effector with passive edge or edge grip type End-effector.
- End-effector material: CFRP, Al, ceramic, or others.
- Optimal end-effector is selectable according to the carrying object and line layout.
Standard Specifications
| Robot Arm Model | SVCR3160-020-PM | |||
|---|---|---|---|---|
| Handled Object | Wafer up to 12 inches | |||
| Wafer Holding Method | By end-effector with passive edge or edge grip type end-effector | |||
| Mechanical Structure | 3-axis Cylindrical coordinate type | |||
| Motor | Stepping motor | |||
| Operating Range | 3rd joint center: 320mm Rotation angle (θ axis): 330deg Vertical Stroke (Z-axis): 20mm |
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| Carrying Speed | Arm (R-axis): 300mm/sec Rotation (θ axis): 120deg/sec Vertical Stroke (Z-axis): 20mm/sec |
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| Repeatability | Within ±0.1mm | |||
| Cleanliness | Magnetic fluid sealing and filter | |||
| Vacuum resistance | 1.33×10-6Pa | |||
| Utility | DC24V±10% 8A | |||
| Mass | Approx. 25kg (robot arm unit) | |||
| Controller Model | C4000 Series | |||
| Interface | RS232C and parallel photo I/O | |||
＊Example of standard specifications with JEL standard end-effector (vacuum type)
