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Products
High-Tech Manufacturing
Stepping motor
SVCR3260
3-Axis Cylindrical Coordinate Clean Robot
- Features
- Designed for handling wafers in the vacuum chamber of production line and inspection line.
- Double payload and superior cost performance compared to SVHR series.
- Compatible with SVHR series and it is possible to replace or upgrade into SVCR series.
Description
Model Name
SVCR3260
Environment
Magnetic fluid sealing and filter
Vacuum (Temp. 15°C to 50°C)
Driving unit：Clean room atmosphere (Temp. 15°C to 40°C)
Vertical Stroke (Z-axis)
20mm / 40mm
*Design can be modified according to equipment specifications and requirements.
Payload Capacity
Below 2 kg (Caculated for the 3rd joint)
Characteristics
Designed for handling wafers in the vacuum chamber of production line and inspection line.
Double payload and superior cost performance compared to SVHR series.
Compatible with SVHR series and it is possible to replace or upgrade into SVCR series.
- Magnetic fluid sealing is used for arm joint.
- Vacuum sealing: Magnetic fluid sealing and bellows are used.
- For cleanliness: 5µm mesh filter installed for exhaust ventilation in the arm.
- Motion monitoring is available.
- RS232C and parallel photo I/O are standard for control.
- 2-phase stepping motor installed in all axes.
- Servo motor type is available.
- High-speed, high-accuracy wafer handlingby S-curved speed control.
- Wafer holding: end-effector with passive edge or edge grip type End-effector.
- End-effector material: CFRP, Al, ceramic, or others.
- Optimal end-effector is selectable according to the carrying object and line layout.
Standard Specifications
| Robot Arm Model | SVCR3260-040-PM | |||
|---|---|---|---|---|
| Handled Object | Wafer up to 12 inches | |||
| Mechanical Structure | 3-axis Cylindrical coordinate type | |||
| Motor | Stepping motor | |||
| Operating Range | 3rd joint center: 520mm Rotation angle (θ axis): 330deg Vertical Stroke (Z-axis): 40mm |
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| Carrying Speed(Ave.) | Arm (R-axis): 300mm/sec Rotation (θ axis): 120deg/sec Vertical Stroke (Z-axis): 20mm/sec |
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| Carrying Speed(Max.) | Arm (R-axis): 550mm/sec Rotation (θ axis): 170deg/sec Vertical Stroke (Z-axis): 30mm/sec |
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| Resolution | Arm (R-axis): Below 82µm Rotation (θ axis): 0.009deg Vertical Stroke (Z-axis): 1.25µm |
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| Handling level | 98mm (Mounting level to upper end-effector level | |||
| Repeatability | Within ±0.1mm | |||
| Cleanliness | Magnetic fluid sealing and filter | |||
| Vacuum resistance | 1.33×10-6Pa | |||
| Utility | Power: DC24V±10% 8A | |||
| Controller Model | C4000 Series | |||
| Interface | RS232C and parallel photo I/O | |||
＊Representative specifications of SVCR3260-040-PM.
It can be changed depending on the carrying object and end-effector type.
