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Products
High-Tech Manufacturing
Stepping motor
SVCR3330S
3-Axis Cylindrical Coordinate Clean Robot
- Features
- Designed for handling susceptor tray up to 4kg with shuttle type twin end-effector in the vacuum chamber of production line and inspection line.
- Cost performance is superior compared to LVHR series.
Description
Model Name
SVCR3330S
Environment
Magnetic fluid sealing and filter
Vacuum (Temp. 15°C to 50°C)
Driving unit：Clean room atmosphere (Temp. 15°C to 40°C)
Vertical Stroke (Z-axis)
60 mm
Payload Capacity
Below 10 kg (Caculated for the 3rd joint)
Characteristics
Designed for handling susceptor tray up to 4kg with shuttle type twin end-effector in the vacuum chamber of production line and inspection line.
Cost performance is superior compared to LVHR series.
- Magnetic fluid sealing is used for arm joint.
- Vacuum sealing: Magnetic fluid sealing and bellows are used.
- For cleanliness: 5µm mesh filter installed for exhaust ventilation in the arm.
- Motion monitoring is available.
- RS232C and parallel photo I/O are standard for control.
- 2-phase stepping motor installed in all axes.
- Servo motor type is available.
- High-speed, high-accuracy wafer handlingby S-curved speed control.
- Wafer holding: end-effector with passive edge or edge grip type End-effector.
- End-effector material: CFRP, Al, ceramic, or others.
- Optimal end-effector is selectable according to the carrying object and line layout.
Standard Specifications
| Robot Arm Model | SVCR3330S-060-PM | |||
|---|---|---|---|---|
| Handled Object | 342mm tray x 2 (Representative example) | |||
| Mechanical Structure | 3-axis Cylindrical coordinate type | |||
| Motor | Stepping motor | |||
| Operating Range | From the robot center to the wafer center: 1075mm Rotation angle (θ axis): 330deg Vertical Stroke (Z-axis): 60mm |
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| Carrying Speed(Ave.) | Arm (R-axis): 250mm/sec Rotation (θ axis): 90deg/sec Vertical Stroke (Z-axis): 30mm/sec |
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| Carrying Speed(Max.) | Arm (R-axis): 380mm/sec Rotation (θ axis): 135deg/sec Vertical Stroke (Z-axis): 45mm/sec |
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| Resolution | Arm (R-axis): Below 65µm Rotation (θ axis): 0.0056deg Vertical Stroke (Z-axis): 2.777µm |
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| Handling level | 188.5mm (Mounting level to end-effector level) | |||
| Repeatability | Within ±0.2mm | |||
| Cleanliness | Magnetic fluid sealing and filter | |||
| Vacuum resistance | 1.33×10-6Pa | |||
| Utility | Power: DC24V±10% 11A | |||
| Controller Model | C5000S Series | |||
| Interface | RS232C and parallel photo I/O | |||
＊Representative specifications of SVCR3330S-060-PM (stepping motor type).
It can be changed depending on the carrying object and end-effector type.
