MCR3160C Series(AC servo motor)
3-Axis Cylindrical Coordinate Type Single-Arm Clean Robot
Environment
Clean room atmosphere
Single arm
Arm length
160mm, 200mm
Vertical Stroke
300mm / 400mm / 500mm
＊The design can be changed according to the equipment specification requirements.
Payload Capacity
4kg(calculated for the arm 3rd joint)
Characteristics
Clean Robot MCR3000C Series
High-speed handling by AC servo motors for all axes.
Suitable for high throughput.
● AC servo motors with absolute encoders are installed in all axes.
● Payload capacity: 4 kg or less (calculated on the arm 3rd joint)
● Control method: RS232C and parallel photo I/O
● Base or flange mounting type is selectable according to system layouts.
● Wafer holding: end-effector with vacuum suction, passive edge, edge grip, or Bernoulli type End-effector.
Standard Specifications
Robot Model
MCR3160C-300-AM
Carrying Object
Up to 300mm silicon wafer
Wafer Holding Method
By vacuum suction
Robot Model Type
3-Axis Cylindrical coordinate type
Motor Type
AC servo motor
Operating Range
From the robot center to the wafer center：567.7mm
Rotation Angle (Theta-axis)：340deg
Z-axis: 300mm
Carrying Speed
Arm (R-axis)：1000mm/sec
Rotation Angle (Theta-axis) : 360 deg/sec
Z-axis：350mm / sec
Repeatability
Within ±0.1mm
Cleanliness
ISO Class 2 (at wafer transfer level when exhausting driving part)
Utility
Power: AC200V single phase ±10% 3kVA
Vacuum: -53kPa or more
Controller Model
C5000S series
Interface
RS232C and parallel photo I/O
傑億爾股份有限公司
統一編號: 89133741
新竹縣竹北市嘉政九街29號1樓
JEL Automation Co.,Ltd
1F., No. 29, Jiazheng 9th St., Zhubei City, Hsinchu County 302053 , Taiwan (R.O.C.)
TEL: 03-6583741