0
Products
High-Tech Manufacturing
Horizontal and Multi-Joint Type Clean Robot
GTVCR5330
5-Axis Horizontal and Multi-Joint Type Clean Robot
- Features
- Achieved cost reduction while maintaining the performance and functions of conventional robot GTVHR5000 series.
- Transfers to the parallel stages in the vacuum chamber and supports various layouts, reducing footprint and vacuuming volume.
- Simplification of the chamber layout leads to the cost reduction.
- Suitable to the inline layout.
- Execution of origin search is not required by using the servo motors with absolute encoders.
Description
Model Name
GTVCR5330
Environment
Magnetic fluid sealing and filter
Clean room atmosphere (Temp. 15°C to 40°C)
Process chamber (Max. Temp. 450°C)
Vertical Stroke (Z-axis)
60 mm
Payload Capacity
Below 4 kg (Caculated for the 3rd joint)
Characteristics
Achieved cost reduction while maintaining the performance and functions of conventional robot GTVHR5000 series.
Transfers to the parallel stages in the vacuum chamber and supports various layouts, reducing footprint and vacuuming volume.
Simplification of the chamber layout leads to the cost reduction.
Suitable to the inline layout.
Execution of origin search is not required by using the servo motors with absolute encoders.
- Arm lineup: 280mm, 330mm
- Magnetic fluid sealing is used for arm joint.
- Vacuum sealing: Magnetic fluid sealing and bellows are used.
- For cleanliness: 5µm mesh filter installed for exhaust ventilation in the arm.
- Twin end-effector reduces the wafer swap time.
- Motion monitoring is available.
- RS232C and parallel photo I/O are standard for control.
- AC servo motors with absolute encoders installed in all axes.
- High-speed, high-accuracy wafer handlingby S-curved speed control.
- Wafer holding: end-effector with passive edge or edge grip type end-effector, and friction retaining by O-ring.
- End-effector material: CFRP, Al, ceramic, or others.
- Optimal end-effector is selectable according to the carrying object and line layout.
Standard Specifications
| Robot Arm Model | GTVCR5330-060-AM | ||
|---|---|---|---|
| Handled Object | Wafer up to 12 inches | ||
| Mechanical Structure | 5-axis Horizontal and multi-joint type | ||
| Motor | AC servo motor | ||
| Operating Range | 3rd Joint Center: 635mm Rotation angle (θ axis): 360deg Vertical Stroke (Z-axis): 60mm |
||
| Carrying Speed(Ave.) | Arm (R-axis): 640mm/sec Rotation (θ axis): 160deg/sec Vertical Stroke (Z-axis): 60mm/sec |
||
| Carrying Speed(Max.) | Arm (R-axis): 950mm/sec Rotation (θ axis): 200deg/sec Vertical Stroke (Z-axis): 85mm/sec |
||
| Resolution | 1st Joint Axis (J1-axis): 0.00081deg 2nd Joint Axis (J2-axis): 0.00081deg 3rd Joint Axis (J3-axis): 0.00072deg 3rd Joint Axis (J5-axis): 0.00072deg Z-Axis (J4-axis): 0.98µm |
||
| Handling Level | 219mm (Mounting level to upper end-effector level) | ||
| Repeatability | Within ±0.1mm | ||
| Cleanliness | Magnetic fluid sealing and filter | ||
| Vacuum resistance | 1 x 10-6Pa | ||
| Utility | Power: AC200 to 230V 2kVA 50/60Hz | ||
| Controller Model | C5000S Series | ||
| Interface | RS232C and parallel photo I/O | ||
＊These specifications are typical for GTVCR5330-060-AM. They may differ depending on the transported object and chuck shape.
