GCR4210 Series(AC servo motor)
4-Axis Horizontal and Multi-Joint Type Single-Arm Clean Robot
Environment
Clean room atmosphere
Single arm
Arm length
210mm(Standard)
Vertical Stroke
300mm / 320mm / 500mm
*The design can be changed according to the equipment specification requirements.
Payload Capacity
4kg(calculated for the arm 3rd joint)
Characteristics
Clean Robot GCR4000-PM Series
Featuring stepping motors with absolute encoders, this series ensures high safety and stability.
This JEL’s long-term standard robot allows users to customize easily.
Suitable for various types of wafers up to 300 mm.
● 2 FOUP access without a track
● Base or flange mounting type is selectable according to system layouts.
● Payload capacity: 4 kg or less (calculated on the arm 3rd joint)
● Control method: RS232C and parallel photo I/O
● AC servo motors with absolute encoders installed in all axes.
● Wafer holding: end-effector with vacuum suction, passive edge, edge grip, or Bernoulli type End-effector.
Standard Specifications
Robot Model
GCR4210-300-PM
Carrying Object
Up to 300mm silicon wafer
Wafer Holding Method
By vacuum suction
Robot Model Type
4-Axis Horizontal and Multi-Joint Type
Motor Type
AC servo motor
Operating Range
From the robot center to the wafer center:760mm
Rotation Angle (Theta-axis):335度
Z-axis: 300mm
Carrying Speed
Arm (R-axis):635mm/0.8sec
Rotation Angle (Theta-axis):335度/1.0sec
Z-axis:300mm / 0.9sec
Repeatability
Within ±0.1mm
Cleanliness
ISO Class 2 (at wafer transfer level when exhausting driving part)
Utility
Power: AC200V Single phase ±10% 2kVA
Vacuum: -53kPa or more
Mass
Approx. 37kg
Controller Model
C5000S series
Interface
RS232C and parallel photo I/O
傑億爾股份有限公司
統一編號: 89133741
新竹縣竹北市嘉政九街29號1樓
JEL Automation Co.,Ltd
1F., No. 29, Jiazheng 9th St., Zhubei City, Hsinchu County 302053 , Taiwan (R.O.C.)
TEL: 03-6583741