GCR4210 Series(AC servo motor)

4-Axis Horizontal and Multi-Joint Type Single-Arm Clean Robot

Environment

Clean room atmosphere

Single arm

Arm length

210mm(Standard)

Vertical Stroke

300mm / 320mm / 500mm

*The design can be changed according to the equipment specification requirements.

Payload Capacity

4kg(calculated for the arm 3rd joint)

Characteristics

Clean Robot GCR4000-PM Series
Featuring stepping motors with absolute encoders, this series ensures high safety and stability.

This JEL’s long-term standard robot allows users to customize easily.

Suitable for various types of wafers up to 300 mm.

● 2 FOUP access without a track

● Base or flange mounting type is selectable according to system layouts.

● Payload capacity: 4 kg or less (calculated on the arm 3rd joint)

● Control method: RS232C and parallel photo I/O

● AC servo motors with absolute encoders installed in all axes.

● Wafer holding: end-effector with vacuum suction, passive edge, edge grip, or Bernoulli type End-effector.

Standard Specifications

Robot Model

GCR4210-300-PM

Carrying Object

Up to 300mm silicon wafer

Wafer Holding Method

By vacuum suction

Robot Model Type

4-Axis Horizontal and Multi-Joint Type

Motor Type

AC servo motor

Operating Range

From the robot center to the wafer center:760mm

Rotation Angle (Theta-axis):335度

Z-axis: 300mm

Carrying Speed

Arm (R-axis):635mm/0.8sec

Rotation Angle (Theta-axis):335度/1.0sec
Z-axis:300mm / 0.9sec

Repeatability

Within ±0.1mm

Cleanliness

ISO Class 2 (at wafer transfer level when exhausting driving part)

Utility

Power: AC200V Single phase ±10% 2kVA
Vacuum: -53kPa or more

Mass

Approx. 37kg

Controller Model

C5000S series

Interface

RS232C and parallel photo I/O

傑億爾股份有限公司

統一編號: 89133741

新竹縣竹北市嘉政九街29號1樓

JEL Automation Co.,Ltd

1F., No. 29, Jiazheng 9th St., Zhubei City, Hsinchu County 302053 , Taiwan (R.O.C.)

TEL: 03-6583741