GTCR5280 Series
(伺服馬達)
GTCR5280 Series(AC servo motor)
5-Axis Horizontal and Multi-Joint Type Single-Arm Twin End-Effector Clean Robot
Environment
Clean room atmosphere
Single arm
Arm length
210mm, 280mm
Vertical Stroke
300mm
＊The design can be changed according to the equipment specification requirements.
Payload Capacity
4kg(calculated for the arm 3rd joint)
Characteristics
Clean Robot GTCR5000 Series
Twin end-effectors mounted on its single-arm, this series has the same function as a twin-arm robot.
AC servo motors capable of high-speed handling ensures high safety and stability.
Suitable for various types of wafers or substrates as well as wafers up to 300 mm.
● Capable of transferring large diameter wafers and small FPD glass substrates.
● High-speed 3 FOUP access without a track for 300 mm wafers.
● AC servo motors with absolute encoders are installed in all axes.
● Payload capacity: 4 kg or less (calculated on the arm 3rd joint)
● Control method: RS232C and parallel photo I/O
● Base or flange mounting type is selectable according to system layouts.
● Wafer holding: end-effector with vacuum suction, passive edge, edge grip, or Bernoulli type End-effector.
Standard Specifications
Robot Model
GTCR5280-300-AM
Carrying Object
Up to 300mm silicon wafer
Wafer Holding Method
By vacuum suction
Robot Model Type
5-Axis Horizontal and Multi-Joint Type
Motor Type
AC servo motor
Operating Range
From the robot center to the wafer center：953mm
Rotation Angle (Theta-axis)：335deg
Z-axis: 300mm
Carrying Speed
Arm (R-axis)：833mm/sec
Rotation Angle (Theta-axis)：250 deg/sec
Z-axis：300mm / sec
Repeatability
Within ±0.1mm
Cleanliness
ISO Class 2 (at wafer transfer level when exhausting driving part)
Utility
Power: AC200V Single phase ±10% 2kVA
Vacuum: -53kPa or more
Mass
Approx. 50kg
Controller Model
C5000S series
Interface
RS232C and parallel photo I/O
傑億爾股份有限公司
統一編號: 89133741
新竹縣竹北市嘉政九街29號1樓
JEL Automation Co.,Ltd
1F., No. 29, Jiazheng 9th St., Zhubei City, Hsinchu County 302053 , Taiwan (R.O.C.)
TEL: 03-6583741