GTFR5280

5-Axis Horizontal and Multi-Joint Type Clean Robot

Features: 5-Axis horizontal and multi-joint type clean robot for 12 inches wafer.; A twin end-effector mounted on its single-arm has the same function as a twin-arm robot.; Designed for handling wafers in EFEM.; Compared to our conventional GTCR model, the cycle time is improved by reducing the operation prohibited area and the influence of speed limit.

GTFR5280

ISO Class 1 Clean room atmosphere

320 mm

Below 4 kg (Caculated for the 3rd joint)

5-Axis horizontal and multi-joint type clean robot for 12 inches wafer.

A twin end-effector mounted on its single-arm has the same function as a twin-arm robot.

Designed for handling wafers in EFEM.

Compared to our conventional GTCR model, the cycle time is improved by reducing the operation prohibited area and the influence of speed limit.

3 FOUP access is available without a track.

Twin end-effector reduces the wafer swap time.

AC servo motors with absolute encoders installed. (Batteryless)/ Direct Drive Motor

Wafer holding: end-effector with vacuum suction, passive edge, edge grip.

Optimal end-effector is selectable according to the carrying object and line layout.

Robot Arm Model	GTFR5280-320-DM
Handled Object	Up to 12 inches silicon wafer
Wafer Holding Method	By vacuum suction
Mechanical Structure	5-axis horizontal and multi-joint type
Motor	AC servo motor (Batteryless)/ Direct Drive Motor
Operating Range	From the robot center to the wafer center: 893mm Vertical Stroke (Z-axis): 320mm
Transfer Speed (Ave.)	Arm (R-axis): 950 mm/sec（when cylindrical operation） Vertical Stroke (Z-axis): 320 mm/sec
Repeatability	Within ±0.05mm
Cleanliness	ISO Class 1
Facility Requirements	Power: AC200～240V -15%/+10% 50/60Hz Vacuum: -53 kPa or more
Weight	Approx. 70 kg

＊Example of standard specifications with JEL standard end-effector (vacuum type)

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