GTCR5280 Series
(伺服馬達)
GTFR5280 Series(AC servo motor)
5-Axis Horizontal and Multi-Joint Type Clean Robot
Environment
Clean room atmosphere
Single arm
Arm Length
280(standard)
Vertical Stroke
320mm
＊The design can be changed according to the equipment specification requirements.
Payload Capacity
4kg (calculated for the arm 3rd joint)
Characteristics
5-Axis horizontal and multi-joint type clean robot for 300 mm wafer.
A twin end-effector mounted on its single-arm has the same function as a twin-arm robot.
Designed for handling wafers in EFEM.
Compared to our conventional GTCR model, the cycle time is improved by reducing the operation prohibited area and the influence of speed limit.
●3 FOUP access is available without a track.
●Twin end-effector reduces the wafer swap time.
●AC servo motors with absolute encoders installed in all axes. (Batteryless)
●Wafer holding: end-effector with vacuum suction, passive edge, edge grip.
●Optimal end-effector is selectable according to the carrying object and line layout.
Standard Specifications
Robot Model
GTFR5280-320-DM
Carrying Object
Up to 300mm silicon wafer
Wafer Holding Method
By vacuum suction
Robot Model Type
5-Axis Horizontal and Multi-Joint type
Motor Type
AC servo motor (Batteryless)
Operating Range
From the robot center to the wafer center 893 mm
Vertical Stroke (Z-axis) 320mm
Carrying Speed
Arm (R-axis) 900mm/sec（when cylindrical operation）
Vertical Stroke (Z-axis) 320mm/sec
Repeatability
Within ±0.05 mm
Cleanliness
ISO Class 1
Utility
Power: AC200V Single phase ±10% 2 kVA
Vacuum: -75 kPa or more
Mass
Approx. 80kg
Controller Model
C5500S series
Interface
RS232C and parallel photo I/O
傑億爾股份有限公司
統一編號: 89133741
新竹縣竹北市嘉政九街29號1樓
JEL Automation Co.,Ltd
1F., No. 29, Jiazheng 9th St., Zhubei City, Hsinchu County 302053 , Taiwan (R.O.C.)
TEL: 03-6583741